EMLC 2006 : 22nd European mask and lithography conference : 23-26 January 2006 : Dresden, Germany. : EMLC2006 : Jan 2006, Dresden, Germany. (SPIE Proceedings ; 6281)

EMLC 2006 : 22nd European mask and lithography conference : 23-26 January 2006 : Dresden, Germany. : EMLC2006 : Jan 2006, Dresden, Germany.

(SPIE Proceedings ; 6281)

Call No. (NDL): M17-06-2179
Bibliographic ID of National Diet Library: 000008270206

Material type: 図書

Author: VDE/VDI. Society Microelectronics, Micro- and Precision Engineering (GMM)ほか

Publisher: SPIE

Publication date: c2006.

Material Format: Paper

Capacity, size, etc.: 1 v. (various pagings) : ill. ; 28 cm.

NDC: -

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Notes on use

Note (General)：: Selected papers."It has annually brought together scientists, (...) " -- foreword.

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Paper

Material Type: 図書
ISBN: 0819463566
ISSN (series): 0277-786X
Title: EMLC 2006 : 22nd European mask and lithography conference : 23-26 January 2006 : Dresden, Germany. : EMLC2006 : Jan 2006, Dresden, Germany.
Series Title: SPIE Proceedings ; 6281
Title Heading: Proceedings of SPIE -- the International Society for Optical Engineering ; v. 6281.
Author Heading: VDE/VDI. Society Microelectronics, Micro- and Precision Engineering (GMM)
Behringer, Uwe F. W.
European Mask and Lithography Conference (22nd : 2006 : Dresden, Germany)
Publication, Distribution, etc.: Bellingham : SPIE
Publication Date: c2006.
Publication Date (W3CDTF): 2006
Extent: 1 v. (various pagings) : ill. ; 28 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Integrated circuits -- Masks -- Congresses.
Microlithography -- Congresses.
NDLC: M17
Note (General): Selected papers.
"It has annually brought together scientists, (...) " -- foreword.
Note (Bibliography): Includes bibliographic references and author index.
Holding library: 国立国会図書館
Call No.: M17-06-2179
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000008270206
http://id.ndl.go.jp/bib/000008270206
RLIN No.: MOHG70780606-B
Bibliographic Record Category (NDL): 215