Plasma electronics : applications in microelectronic device fabrication / T. Makabe, Z. Petrović.

• Material Type: 図書
• ISBN: 9780750309769 (ISBN-13 : hardcover); 0750309768 (ISBN-10 : hardcover)
• Title: Plasma electronics : applications in microelectronic device fabrication / T. Makabe, Z. Petrović.
• Series Title: Series in plasma physics
• Author Heading: 真壁, 利明, 1947- マカベ, トシアキ, 1947- ( 00162951 )Authorities; Petrović, Z.
• Publication, Distribution, etc.: New York : Taylor & Francis
• Publication Date: 2006.
• Publication Date (W3CDTF): 2006
• Extent: 339 p. : ill. ; 25 cm.
• Place of Publication (Country Code): US
• Text Language Code: eng
• Subject Heading: Plasma engineering.
• LCC: TA2020
• DDC: 621.044
• NDLC: MC241
• Note (Bibliography): Includes bibliographical references and index.
• Holding library: 国立国会図書館
• Call No.: MC241-B7
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000008301783; http://id.ndl.go.jp/bib/000008301783
• LC Control Number: 2005056888; https://lccn.loc.gov/2005056888
• RLIN No.: DCLC2005056888-B
• Cataloging Rule: Anglo-American Cataloging Rules
• Bibliographic Record Category (NDL): 211