Thin film materials technology : sputtering of compound materials / by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi.

• Material Type: 図書
• ISBN: 0815514832 (William Andrew Inc. : alk. paper); 3540211187 (Springer-Verlag GmbH & Co. KG)
• Title: Thin film materials technology : sputtering of compound materials / by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi.
• Author Heading: 和佐, 清孝 ワサ, キヨタカ ( 00130622 )Authorities; Kitabatake, Makoto. [北畠真]; Adati, Hideaki. [足立秀明]
• Publication, Distribution, etc.: Norwich, NY : W. Andrew Pub.; Heidelberg : Springer
• Publication Date: c2004.
• Publication Date (W3CDTF): 2004
• Extent: xiv, 518 p. : ill. ; 24 cm.
• Place of Publication (Country Code): US
• Text Language Code: eng
• Alias of Author: Adachi, Hideaki. [足立秀明]
• Subject Heading: Cathode sputtering (Plating process); Thin films.
• LCC: TS695
• DDC: 621.3815/2
• NDLC: ND371
• Note (General): Related URL: Table of contents only http: //www.loc.gov/catdir/toc/ecip047/2003018016.html.; Related URL: Publisher description http: //www.loc.gov/catdir/enhancements/fy0632/2003018016-d.html.
• Note (Bibliography): Includes bibliographical references and index.
• Holding library: 国立国会図書館
• Call No.: ND371-B19
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000008311222; http://id.ndl.go.jp/bib/000008311222
• LC Control Number: 2003018016; https://lccn.loc.gov/2003018016
• RLIN No.: DCLC2003018016-B
• Cataloging Rule: Anglo-American Cataloging Rules
• Bibliographic Record Category (NDL): 211