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Bibliographic Record
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- Material Type
- 図書
- Title Transcription
- MEMSヨウ ハクマク キンゾク ガラス ト ソノ サンジゲン リッタイ カコウ ノ ケンキュウ
- Author/Editor
- 下河辺明, 東京工業大学 [著]
- Publication, Distribution, etc.
- Publication Date
- 2003-20052006.5
- Publication Date (W3CDTF)
- 20032005
- Extent
- 102p
- Additional Title
- 研究種目 基盤研究(A)