クラスターイオンビーム基礎と応用 : 次世代ナノ加工プロセス技術

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Material Type: 図書
ISBN: 4-526-05765-7
Title: クラスターイオンビーム基礎と応用 : 次世代ナノ加工プロセス技術
Title Transcription: クラスターイオンビームキソトオウヨウ : ジセダイナノカコウプロセスギジュツ
Author/Editor: 山田公編著
Author Heading: 山田, 公, 1936- ヤマダ, イサオ, 1936- ( 00212816 )Authorities
Publication, Distribution, etc.: 東京 : 日刊工業新聞社
Publication Date: 2006.10
Publication Date (W3CDTF): 2006
Extent: 223p
Size: 21cm
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: イオンビームイオンビーム ( 00576754 )Authorities
イオンビーム加工イオンビームカコウ ( 01187680 )Authorities
NDC 9th ed.: 549.1 : Electronic engineering
NDLC: ND351
Target Audience: 一般
Price: 3200円
Holding library: 国立国会図書館
Call No.: ND351-H25
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000008348500
http://id.ndl.go.jp/bib/000008348500
National Bibliography No. (JPNO): 21130821
Cataloging Rule: Nippon Cataloguing Rules 1987 Revised Edition
Bibliographic Record Category (NDL): 111