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Bibliographic Record
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- Material Type
- 博士論文
- Title Transcription
- プラズマ カガク キソウ タイセキ プロセス ニ オケル コウシュウハ ヘンチョウ ニ ヨル ビリュウシ オセン テイゲン
- Author/Editor
- 柏原伸紀 [著]
- Author Heading
- 柏原, 伸紀 カシハラ, ノブキ
- Publication, Distribution, etc.
- Publication Date
- [2005]
- Publication Date (W3CDTF)
- 2005
- Extent
- 1冊
- Alternative Title
- Suppression of particle contamination by amplitude-modulated radio frequency in a plasma enhanced chemical vapor deposition process