Advances in resist materials and processing technology 24 : 26-28 February 2007 : San Jose, California, USA. : SPIE conference on advances in resist materials and processing technology 24 : international symposium on advanced lithography : Feb 2007, San Jose, CA. (SPIE Proceedings ; 6519)

Advances in resist materials and processing technology 24 : 26-28 February 2007 : San Jose, California, USA. : SPIE conference on advances in resist materials and processing technology 24 : international symposium on advanced lithography : Feb 2007, San Jose, CA.

(SPIE Proceedings ; 6519)

Call No. (NDL): M17-07-1627
Bibliographic ID of National Diet Library: 000008602626

Material type: 図書

Author: SEMATECH, Inc.ほか

Publisher: SPIE

Publication date: c2007.

Material Format: Paper

Capacity, size, etc.: 2 parts : ill. ; 28 cm.

NDC: -

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Notes on use

Note (General)：: Papers."The Resist Conference also hosted a well-attended joint session on Resists for Extreme UV Lithography with the Emerging Lithography Conference...

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Paper

Material Type: 図書
ISBN (set): 9780819466389 (set)
ISSN (series): 0277-786X
Title: Advances in resist materials and processing technology 24 : 26-28 February 2007 : San Jose, California, USA. : SPIE conference on advances in resist materials and processing technology 24 : international symposium on advanced lithography : Feb 2007, San Jose, CA.
Series Title: SPIE Proceedings ; 6519
Title Heading: Proceedings of SPIE -- the International Society for Optical Engineering ; v. 6519.
Author Heading: SEMATECH, Inc.
Lin, Qinghuang, 1963-
Publication, Distribution, etc.: Bellingham : SPIE
Publication Date: c2007.
Publication Date (W3CDTF): 2007
Extent: 2 parts : ill. ; 28 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Photoresists -- Congresses.
Microlithography -- Congresses.
NDLC: M17
Note (General): Papers.
"The Resist Conference also hosted a well-attended joint session on Resists for Extreme UV Lithography with the Emerging Lithography Conference." -- introd.
" (...) to make their annual pilgrimage to the SPIE Resist Conference year after year." -- introd.
Note (Bibliography): Includes bibliographical references and author index.
Holding library: 国立国会図書館
Call No.: M17-07-1627
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000008602626
http://id.ndl.go.jp/bib/000008602626
OCLC No.: 144527843
https://www.worldcat.org/oclc/144527843
Bibliographic Record Category (NDL): 215