図書

Optical microlithography 20 : 27 February-2 March 2007 : San Jose, California, USA. : Feb 2007, San Jose, CA. (SPIE Proceedings ; 6520)

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Optical microlithography 20 : 27 February-2 March 2007 : San Jose, California, USA. : Feb 2007, San Jose, CA.

(SPIE Proceedings ; 6520)

Call No. (NDL)
M17-07-1777
Bibliographic ID of National Diet Library
000008715746
Material type
図書
Author
SEMATECH, Inc.ほか
Publisher
SPIE
Publication date
c2007.
Material Format
Paper
Capacity, size, etc.
3 parts : ill. (some col.) ; 28 cm.
NDC
-
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Paper

Material Type
図書
ISBN (set)
9780819466396 (set)
ISSN (series)
0277-786X
Publication, Distribution, etc.
Publication Date
c2007.
Publication Date (W3CDTF)
2007