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Bibliographic Record
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- Material Type
- 博士論文
- Title Transcription
- ULSI タソウ ハイセン ケイセイ ノ タメ ノ ドウ テイユウデンリツマク ノ カガクテキ キカイ ケンマ ギジュツ ノ ケンキュウ
- Author/Editor
- 石川彰 [著]
- Author Heading
- 石川, 彰 イシカワ, アキラ
- Publication, Distribution, etc.
- Publication Date
- [2007]
- Publication Date (W3CDTF)
- 2007
- Extent
- 1冊
- Alternative Title
- Chemical mechanical polishing of copper and low-dielectric materials for ULSI multilevel interconnection