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博士論文

Monolithic PZT microstage with multi-degrees of freedom for the application of nanopositioning

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Monolithic PZT microstage with multi-degrees of freedom for the application of nanopositioning

Call No. (NDL)
UT51-2007-M52
Bibliographic ID of National Diet Library
000009085986
Material type
博士論文
Author
Hegen Xu [著]
Publisher
[Hegen Xu]
Publication date
[2006]
Material Format
Paper
Capacity, size, etc.
1冊
Name of awarding university/degree
東北大学,博士 (工学)
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博士論文

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Paper

Material Type
博士論文
Author/Editor
Hegen Xu [著]
Author Heading
徐, 和根 ジョ, ワコン
Publication, Distribution, etc.
Publication Date
[2006]
Publication Date (W3CDTF)
2006
Extent
1冊
Alternative Title
ナノポジショニング応用のための多自由度モノリシックPZTマイクロステージ ナノポジショニング オウヨウ ノ タメ ノ タジユウド モノリシック PZT マイクロステージ
Degree grantor/type
東北大学