Semiconductor industry : wafer fab exhaust management / J. Michael Sherer.

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Note (General)：: Related URL: Publisher description http: //www.loc.gov/catdir/enhancements/fy0648/2005050566-d.html.

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Material Type: 図書
ISBN: 1574447203 (alk. paper)
9781574447200 (alk. paper)
Title: Semiconductor industry : wafer fab exhaust management / J. Michael Sherer.
Author Heading: Sherer, J. Michael, 1958-
Publication, Distribution, etc.: Boca Raton, FL : CRC/Taylor & Francis
Publication Date: 2005.
Publication Date (W3CDTF): 2005
Extent: 194 p. ; 25 cm.
Alternative Title: Wafer fab exhaust management
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Semiconductor wafers -- Design and construction.
Semiconductor industry -- Environmental aspects.
Volatile organic compounds -- Environmental aspects.
Air -- Purification -- Technological innovations.
LCC: TK7871.85
DDC: 621.3815/2/0286
NDLC: ND371
Note (General): Related URL: Publisher description http: //www.loc.gov/catdir/enhancements/fy0648/2005050566-d.html.
Note (Bibliography): Includes bibliographical references and index.
Holding library: 国立国会図書館
Call No.: ND371-B28
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000009149908
http://id.ndl.go.jp/bib/000009149908
LC Control Number: 2005050566
https://lccn.loc.gov/2005050566
OCLC No.: 60543377
https://www.worldcat.org/oclc/60543377
Cataloging Rule: Anglo-American Cataloging Rules
Bibliographic Record Category (NDL): 211