図書

Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A. : MRS spring meeting : symposium C, "advances and challenges in chemical mechanical planarization" : Apr 2007, San Francisco, CA. (Materials Research Society Symposia Proceedings ; 991)

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Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A. : MRS spring meeting : symposium C, "advances and challenges in chemical mechanical planarization" : Apr 2007, San Francisco, CA.

(Materials Research Society Symposia Proceedings ; 991)

Call No. (NDL)
M17-08-301
Bibliographic ID of National Diet Library
000009215167
Material type
図書
Author
Zwicker, Gerfried.ほか
Publisher
Materials Research Society
Publication date
c2007.
Material Format
Paper
Capacity, size, etc.
xi, 371 p. : ill. ; 24 cm.
NDC
-
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Paper

Material Type
図書
ISBN
9781558999510
Title
Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A. : MRS spring meeting : symposium C, "advances and challenges in chemical mechanical planarization" : Apr 2007, San Francisco, CA.
Series Title
Materials Research Society Symposia Proceedings ; 991
Title Heading
Materials Research Society symposia proceedings ; v. 991.
Author Heading
Zwicker, Gerfried.
Symposium C, "Advances and Challenges in Chemical Mechanical Planarization" (2007 : San Francisco, Calif.)
Publication, Distribution, etc.
Warrendale : Materials Research Society
Publication Date
c2007.
Publication Date (W3CDTF)
2007
Extent
xi, 371 p. : ill. ; 24 cm.