Comprehensive microsystems / editors-in-chief, Yogesh B. Gianchandani, Osamu Tabata, Hans Zappe.

• Material Type: 図書
• ISBN: 9780444521910 (v. 1 : hbk.); 9780444521927 (v. 2 : hbk.); 9780444521934 (v. 3 : hbk.)
• ISBN (set): 9780444521941 (set : hbk.); 0444521941 (set : hbk.)
• Title: Comprehensive microsystems / editors-in-chief, Yogesh B. Gianchandani, Osamu Tabata, Hans Zappe.
• Author Heading: Gianchandani, Yogesh B.; 田畑, 修, 1956- タバタ, オサム, 1956- ( 00674558 )Authorities; Zappe, Hans P.
• Publication, Distribution, etc.: Amsterdam : Elsevier; Oxford : Elsevier
• Publication Date: c2008.
• Publication Date (W3CDTF): 2008
• Extent: 3 v. : ill. (some col.) ; 27 cm.
• Place of Publication (Country Code): NL
• Text Language Code: eng
• Subject Heading: Microelectromechanical systems.
• LCC: TK7875
• NDLC: ND416
• Note (General): Related URL: http: //www.sciencedirect.com/science/referenceworks/9780444521903.
• Note (Bibliography): Includes bibliographical references and index.
• Holding library: 国立国会図書館
• Call No.: ND416-B19
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000009223130; http://id.ndl.go.jp/bib/000009223130
• OCLC No.: 225171209; https://www.worldcat.org/oclc/225171209
• Cataloging Rule: Anglo-American Cataloging Rules
• Bibliographic Record Category (NDL): 211

• Contents: v. 1. Materials ; Fabrication and packaging ; Electronics and systems designv. 2. Actuation mechanism ; Physical sensing ; Chemical and biological sys...