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Table of Contents
Contents
Preface/ iii
Acknowledgements/ iv
A. Plenary
1. Silicon crystal technologies for ultra large scale integration/ 1
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Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 図書
- Volume
- 2007
- Author/Editor
- editors: H. Yamada-Kaneta, H. Onoorganized by: The Organizing Committee of The Silicon Materials Science and Technology Forum
- Author Heading
- 金田, 寛 カネタ, ヒロシ ( 00939685 )Authorities小野, 春彦 オノ, ハルヒコ ( 01117241 )Authorities
- Publication, Distribution, etc.
- Publication Date
- c2007
- Publication Date (W3CDTF)
- 2007
- Extent
- 387 p.
- Size
- 30 cm