Photomask technology 2007 : 18-21 September 2007 : Monterey, California, USA. : SPIE conference on photomask technology : 27th international symposium on photomask technology : SPIE's annual BACUS symposium on photomask technology : Sep 2007, Monterey, CA. (SPIE Proceedings ; 6730)

Photomask technology 2007 : 18-21 September 2007 : Monterey, California, USA. : SPIE conference on photomask technology : 27th international symposium on photomask technology : SPIE's annual BACUS symposium on photomask technology : Sep 2007, Monterey, CA.

(SPIE Proceedings ; 6730)

Call No. (NDL): M17-08-459
Bibliographic ID of National Diet Library: 000009242231

Material type: 図書

Author: Naber, Robert J.ほか

Publisher: SPIE

Publication date: c2007.

Material Format: Paper

Capacity, size, etc.: 3 parts : ill. (some col.) ; 28 cm.

NDC: -

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Notes on use

Note (General)：: Papers." (...) convened in Monterey for SPIE's annual BACUS Symposium on Photomask Technology (Sept. 16-21) (...) " -- pt. 1, p. xxxi.

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Paper

Material Type: 図書
ISBN (set): 9780819468871 (set)
ISSN (series): 0277-786X
Title: Photomask technology 2007 : 18-21 September 2007 : Monterey, California, USA. : SPIE conference on photomask technology : 27th international symposium on photomask technology : SPIE's annual BACUS symposium on photomask technology : Sep 2007, Monterey, CA.
Series Title: SPIE Proceedings ; 6730
Title Heading: Proceedings of SPIE -- the International Society for Optical Engineering ; v. 6730.
Author Heading: Naber, Robert J.
Kawahira, Hiroichi.
Publication, Distribution, etc.: Bellingham : SPIE
Publication Date: c2007.
Publication Date (W3CDTF): 2007
Extent: 3 parts : ill. (some col.) ; 28 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Integrated circuits -- Masks -- Congresses.
Microlithography -- Congresses.
NDLC: M17
Note (General): Papers.
" (...) convened in Monterey for SPIE's annual BACUS Symposium on Photomask Technology (Sept. 16-21) (...) " -- pt. 1, p. xxxi.
Note (Bibliography): Includes bibliographical references and author index.
Holding library: 国立国会図書館
Call No.: M17-08-459
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000009242231
http://id.ndl.go.jp/bib/000009242231
OCLC No.: 186510143
https://www.worldcat.org/oclc/186510143
Bibliographic Record Category (NDL): 215