Structural characterization of microelectronic devices by Raman and cathodoluminescence spectroscopies

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Material Type: 博士論文
Title: Structural characterization of microelectronic devices by Raman and cathodoluminescence spectroscopies
Author/Editor: Keiko Matsuda [著]
Author Heading: 松田, 景子マツダ, ケイコ
Publication, Distribution, etc.: [Keiko Matsuda]
Publication Date: [2008]
Publication Date (W3CDTF): 2008
Extent: 1冊
Alternative Title: ラマン分光法及びカソードルミネッセンス分光法による微小電子デバイスの構造評価ラマンブンコウホウオヨビカソードルミネッセンスブンコウホウニヨルビショウデンシデバイスノコウゾウヒョウカ
Degree grantor/type: 大阪大学
Date Granted: 平成20年3月25日
Date Granted (W3CDTF): 2008
Dissertation Number: 甲第12700号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2008-D549
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000009403414
http://id.ndl.go.jp/bib/000009403414
Bibliographic Record Category (NDL): 213