Catalytic chemical vapor deposition (Cat-CVD) processes of organic silicon compounds and the future prospects of remote Cat-CVD

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Material Type: 博士論文
Title: Catalytic chemical vapor deposition (Cat-CVD) processes of organic silicon compounds and the future prospects of remote Cat-CVD
Author/Editor: Takashi Morimoto [著]
Author Heading: 森本, 隆志モリモト, タカシ
Publication, Distribution, etc.: [Takashi Morimoto]
Publication Date: [2007]
Publication Date (W3CDTF): 2007
Extent: 2冊 (副論文・参考論文とも)
Alternative Title: 有機シリコン化合物の触媒化学気相堆積(触媒CVD)過程とリモート触媒CVDの将来展望ユウキシリコンカゴウブツノショクバイカガクキソウタイセキ ( ショクバイ CVD ) カテイトリモートショクバイ CVD ノショウライテンボウ
Degree grantor/type: 北陸先端科学技術大学院大学
Date Granted: 平成19年3月22日
Date Granted (W3CDTF): 2007
Dissertation Number: 甲第472号
Degree Type: 博士 (材料科学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2008-D967
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000009405550
http://id.ndl.go.jp/bib/000009405550
Bibliographic Record Category (NDL): 213