現場のスパッタリング薄膜Q&A : 反応性高速スパッタの実務アドバイス

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Material Type: 図書
ISBN: 978-4-526-06119-6
Title: 現場のスパッタリング薄膜Q&A : 反応性高速スパッタの実務アドバイス
Title Transcription: ゲンバノスパッタリングハクマク Q & A : ハンノウセイコウソクスパッタノジツムアドバイス
Author/Editor: 小島啓安著
Author Heading: 小島, 啓安コジマ, ヒロヤス ( 01137042 )Authorities
Publication, Distribution, etc.: 東京 : 日刊工業新聞社
Publication Date: 2008.8
Publication Date (W3CDTF): 2008
Extent: 384p
Size: 21cm
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: 薄膜ハクマク ( 00562857 )Authorities
スパッタリングスパッタリング ( 01155699 )Authorities
NDC 9th ed.: 549.8 : Electronic engineering
NDLC: ND371
NDC (Introduction of Reference Books): 549.8
Target Audience: 一般
Note (Bibliography): 文献あり
Price: 3000円
Holding library: 国立国会図書館
Call No.: ND371-J33
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000009491523
http://id.ndl.go.jp/bib/000009491523
National Bibliography No. (JPNO): 21476860
Cataloging Rule: Nippon Cataloguing Rules 1987 Revised Edition
Bibliographic Record Category (NDL): 111