MEMS用薄膜材料の破壊特性に及ぼす膜厚と温度の効果

MEMS用薄膜材料の破壊特性に及ぼす膜厚と温度の効果

Call No. (NDL): UT51-2008-H296
Bibliographic ID of National Diet Library: 000009521274

Material type: 博士論文

Author: 中尾茂樹 [著]

Publisher: [中尾茂樹]

Publication date: [2008]

Material Format: Paper

Capacity, size, etc.: 1冊

Name of awarding university/degree: 名古屋大学,博士 (工学)

Notes on use

Note (General)：: 博士論文

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Paper

Material Type: 博士論文
Title: MEMS用薄膜材料の破壊特性に及ぼす膜厚と温度の効果
Title Transcription: MEMSヨウハクマクザイリョウノハカイトクセイニオヨボスマクアツトオンドノコウカ
Author/Editor: 中尾茂樹 [著]
Author Heading: 中尾, 茂樹ナカオ, シゲキ
Publication, Distribution, etc.: [中尾茂樹]
Publication Date: [2008]
Publication Date (W3CDTF): 2008
Extent: 1冊
Degree grantor/type: 名古屋大学
Date Granted: 平成20年3月25日
Date Granted (W3CDTF): 2008
Dissertation Number: 甲第7995号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2008-H296
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000009521274
http://id.ndl.go.jp/bib/000009521274
Bibliographic Record Category (NDL): 213