博士論文

MEMS用薄膜材料の破壊特性に及ぼす膜厚と温度の効果

Icons representing 博士論文

MEMS用薄膜材料の破壊特性に及ぼす膜厚と温度の効果

Call No. (NDL)
UT51-2008-H296
Bibliographic ID of National Diet Library
000009521274
Material type
博士論文
Author
中尾茂樹 [著]
Publisher
[中尾茂樹]
Publication date
[2008]
Material Format
Paper
Capacity, size, etc.
1冊
Name of awarding university/degree
名古屋大学,博士 (工学)
View All

Notes on use

Note (General)：

博士論文

Search by Bookstore

Search by Bookstore

Search by Bookstore

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Paper

Material Type
博士論文
Title
MEMS用薄膜材料の破壊特性に及ぼす膜厚と温度の効果
Title Transcription
MEMSヨウ ハクマク ザイリョウ ノ ハカイ トクセイ ニ オヨボス マクアツ ト オンド ノ コウカ
Author/Editor
中尾茂樹 [著]
Author Heading
中尾, 茂樹 ナカオ, シゲキ
Publication, Distribution, etc.
[中尾茂樹]
Publication Date
[2008]
Publication Date (W3CDTF)
2008
Extent
1冊
Degree grantor/type
名古屋大学