半導体CMP用語事典
半導体CMP用語事典
- Call No. (NDL)
- ND2-J4
- Bibliographic ID of National Diet Library
- 000009745139
Detailed bibliographic record
Summary, etc.：
- 半導体CMPの全てがわかる、4000語を収録(Provided by: 出版情報登録センター（JPRO）)
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Northern Japan
北海道立図書館
Paper- Call No.：
- ５４９．７／ＨＡ
- Book Registration Number：
- 1110397542
札幌市中央図書館
Paper- Call No.：
- R549.7/ﾊ/
- Book Registration Number：
- 0117784082
青森県立図書館
Paper- Call No.：
- 549.7-ﾊﾝﾄﾞｳﾀｲ
- Book Registration Number：
- 10213861710
福島県立図書館
Paper- Call No.：
- 549.7-ｾｲ08X
- Book Registration Number：
- 304816960
Kanto
茨城県立図書館
Paper- Call No.：
- R549.7/ﾊﾝ/
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Bibliographic Record
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- Material Type
- 図書
- ISBN
- 978-4-274-20612-2
- Title
- Title Transcription
- ハンドウタイ CMP ヨウゴ ジテン
- Author/Editor
- 精密工学会プラナリゼーションCMPとその応用技術専門委員会 編
- Author Heading
- 精密工学会 セイミツ コウガッカイ ( 00299339 )Authorities
- Publication, Distribution, etc.
- Publication Date
- 2008.10
- Publication Date (W3CDTF)
- 2008
- Extent
- 262p