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- Material Type
- 博士論文
- Title Transcription
- コウデンアツ CMOS クドウ カイロ ト SOI-MEMS アクチュエータ ノ モノリシック シュウセキカ ニ カンスル ケンキュウ
- Author/Editor
- 高橋一浩 [著]
- Author Heading
- 高橋, 一浩 タカハシ, カズヒロ
- Publication, Distribution, etc.
- Publication Date
- [2008]
- Publication Date (W3CDTF)
- 2008
- Extent
- 1冊
- Alternative Title
- A study on monolithic integration of high voltage CMOS driver circuits and SOI-MEMS actuators