図書

MEMSデバイス総論

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MEMSデバイス総論

Call No. (NDL)
NB21-J26
Bibliographic ID of National Diet Library
000010111725
Material type
図書
Author
植田敏嗣 監修
Publisher
サイエンス&テクノロジー
Publication date
2009.4
Material Format
Paper
Capacity, size, etc.
301p ; 27cm
NDC
530
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Detailed bibliographic record

Contents：

MEMSデザインMEMSシミュレーションの現状 / 浅海和雄, 岩崎拓也 著MEMS用設計・解析支援システムの構成と応用 / 浅海和雄, 岩崎拓也 著...

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Table of Contents

  • 目次

  • 第1章 概要

    植田敏嗣

  • 概要/ 3

  • 第2章 MEMSデザイン

  • 第1節 MEMSシミュレーションの現状

    浅海和雄||岩崎拓也

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Bibliographic Record

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Paper

Material Type
図書
ISBN
978-4-903413-65-5
Title
MEMSデバイス総論
Title Transcription
MEMS デバイス ソウロン
Author/Editor
植田敏嗣 監修
Author Heading
植田, 敏嗣 ウエダ, トシツグ ( 01161073 )Authorities
Publication, Distribution, etc.
東京 : サイエンス&テクノロジー
Publication Date
2009.4
Publication Date (W3CDTF)
2009
Extent
301p