図書

Microelectromechanical systems -- materials and devices 2 : symposium held December 1-2, 2008, Boston, Massachusetts, U.S.A. : symposium GG, "microelectromechanical systems -- materials and devices 2" : 2008 MRS fall meeting : Dec 2008, Boston, MA. (Materials Research Society Symposia Proceedings ; 1139)

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Microelectromechanical systems -- materials and devices 2 : symposium held December 1-2, 2008, Boston, Massachusetts, U.S.A. : symposium GG, "microelectromechanical systems -- materials and devices 2" : 2008 MRS fall meeting : Dec 2008, Boston, MA.

(Materials Research Society Symposia Proceedings ; 1139)

Call No. (NDL)
M17-10-472
Bibliographic ID of National Diet Library
000010437097
Material type
図書
Author
Vengallatore, Srikar.ほか
Publisher
Materials Research Society
Publication date
c2009.
Material Format
Paper
Capacity, size, etc.
xi, 247 p. : ill. ; 24 cm.
NDC
-
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Paper

Material Type
図書
ISBN
9781605111117
Title
Microelectromechanical systems -- materials and devices 2 : symposium held December 1-2, 2008, Boston, Massachusetts, U.S.A. : symposium GG, "microelectromechanical systems -- materials and devices 2" : 2008 MRS fall meeting : Dec 2008, Boston, MA.
Series Title
Materials Research Society Symposia Proceedings ; 1139
Title Heading
Materials Research Society symposia proceedings ; v. 1139.
Author Heading
Vengallatore, Srikar.
Materials Research Society. Meeting (2008 : Boston, Mass.)
Symposium GG, "Microelectromechanical Systems -- Materials and Devices II" (2008 : Boston, Mass.)
Publication, Distribution, etc.
Warrendale : Materials Research Society
Publication Date
c2009.
Publication Date (W3CDTF)
2009
Extent
xi, 247 p. : ill. ; 24 cm.