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フォトレジスト材料開発の新展開 ([エレクトロニクスシリーズ])

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フォトレジスト材料開発の新展開

([エレクトロニクスシリーズ])

Call No. (NDL)
PA441-J81
Bibliographic ID of National Diet Library
000010543552
Material type
図書
Author
上田充 監修
Publisher
シーエムシー出版
Publication date
2009.8
Material Format
Paper
Capacity, size, etc.
317p ; 27cm
NDC
578.4
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Table of Contents

  • 目次

  • 第1章 リソグラフィ技術の概要

    岡崎信次

  • 1 はじめに/ 1

  • 2 半導体集積回路の高集積化と光リソグラフィ技術の発展/ 2

  • 3 液浸露光技術/ 5

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Paper

Material Type
図書
ISBN
978-4-7813-0149-5
Title Transcription
フォトレジスト ザイリョウ カイハツ ノ シンテンカイ
Author/Editor
上田充 監修
Author Heading
上田, 充 ウエダ, ミツル ( 01040407 )Authorities
Publication, Distribution, etc.
Publication Date
2009.8
Publication Date (W3CDTF)
2009