図書

プラズマ/プロセスの原理 第2版

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プラズマ/プロセスの原理

第2版

Call No. (NDL)
MC241-J8
Bibliographic ID of National Diet Library
000010688965
Material type
図書
Author
Michael A.Lieberman, Allan J.Lichtenberg 著ほか
Publisher
丸善
Publication date
2010.1
Material Format
Paper
Capacity, size, etc.
612p ; 26cm
NDC
427.6
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Notes on use

Note (General):

初版: EDリサーチ社2001年刊原タイトル: Principles of plasma discharges and materials processing.2nd ed

Detailed bibliographic record

Summary, etc.:

本原理と薄膜プロセスへの応用を解説(Provided by: 出版情報登録センター(JPRO))

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Kanto

  • 鳥取県立図書館

    Paper
    Call No.:
    427.6-リハマ-一般H
    Book Registration Number:
    118072050
  • 岡山県立図書館

    Paper
    Call No.:
    427.6/リハ10/
    Book Registration Number:
    0009570896
  • 宮崎県立図書館

    Paper
    Call No.:
    4276-0015-2ハン
    Book Registration Number:
    1109131365

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Bibliographic Record

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Paper

Material Type
図書
ISBN
978-4-621-08223-2
Title Transcription
プラズマ プロセス ノ ゲンリ
Author/Editor
Michael A.Lieberman, Allan J.Lichtenberg 著
佐藤久明 訳
堀勝 監修
Edition
第2版
Publication, Distribution, etc.
Publication Date
2010.1
Publication Date (W3CDTF)
2010