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博士論文

Growth and characterizations of a series of semiconducting silicide layers based on the reactive deposition techniques

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Growth and characterizations of a series of semiconducting silicide layers based on the reactive deposition techniques

Call No. (NDL)
UT51-2009-S625
Bibliographic ID of National Diet Library
000010820764
Material type
博士論文
Author
Junhua Hu [著]
Publisher
[Junhua Hu]
Publication date
[2009]
Material Format
Paper
Capacity, size, etc.
1冊
Name of awarding university/degree
静岡大学,博士 (工学)
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博士論文

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Paper

Material Type
博士論文
Author/Editor
Junhua Hu [著]
Author Heading
胡, 俊華 コ, シュンカ
Publication, Distribution, etc.
Publication Date
[2009]
Publication Date (W3CDTF)
2009
Extent
1冊
Alternative Title
熱反応堆積法によるシリサイド半導体薄膜の成長及び評価 ネツ ハンノウ タイセキホウ ニ ヨル シリサイド ハンドウタイ ハクマク ノ セイチョウ オヨビ ヒョウカ
Degree grantor/type
静岡大学