図書

Lithography Asia 2009 : 18-19 November 2009 : Taipei, Taiwan. : 2009 lithography Asia conference : Nov 2009, Taipei, Taiwan. (SPIE Proceedings ; 7520)

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Lithography Asia 2009 : 18-19 November 2009 : Taipei, Taiwan. : 2009 lithography Asia conference : Nov 2009, Taipei, Taiwan.

(SPIE Proceedings ; 7520)

Call No. (NDL)
M17-10-2510
Bibliographic ID of National Diet Library
000010874361
Material type
図書
Author
Taiwan Semiconductor Industry Association.ほか
Publisher
SPIE
Publication date
c2009.
Material Format
Paper
Capacity, size, etc.
1 v. (various pagings) : ill. ; 28 cm.
NDC
-
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Notes on use

Note (General)：

Papers."Welcome to the 2009 Lithography Asia conference held in Taipei, Taiwan. This is the second year in a row that (...) " -- introd.

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Paper

Material Type
図書
ISBN
9780819479099
ISSN (series)
0277-786X
Title
Lithography Asia 2009 : 18-19 November 2009 : Taipei, Taiwan. : 2009 lithography Asia conference : Nov 2009, Taipei, Taiwan.
Series Title
SPIE Proceedings ; 7520
Title Heading
Proceedings of SPIE -- the International Society for Optical Engineering, 0277-786X ; v. 7520.
Author Heading
Taiwan Semiconductor Industry Association.
Chen, Alek C.
Publication, Distribution, etc.
Bellingham : SPIE
Publication Date
c2009.
Publication Date (W3CDTF)
2009