26th European mask and lithography conference : 18-20 January 2010 : Grenoble, France. : EMLC 2010 : EMLC2010 : Jan 2010, Grenoble, France. (SPIE Proceedings ; 7545)

26th European mask and lithography conference : 18-20 January 2010 : Grenoble, France. : EMLC 2010 : EMLC2010 : Jan 2010, Grenoble, France.

(SPIE Proceedings ; 7545)

Call No. (NDL): M17-10-3812
Bibliographic ID of National Diet Library: 000010959715

Material type: 図書

Author: VDE/VDI. Society Microelectronics, Micro- and Precision Engineering (GMM)ほか

Publisher: SPIE

Publication date: c2010.

Material Format: Paper

Capacity, size, etc.: 1 v. (various pagings) : ill. ; 28 cm.

NDC: -

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Notes on use

Note (General)：: Papers." (...) EMLC2010 (...) The conference has annually brought together (...) " -- foreword.

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Paper

Material Type: 図書
ISBN: 9780819479419
ISSN (series): 0277-786X
Title: 26th European mask and lithography conference : 18-20 January 2010 : Grenoble, France. : EMLC 2010 : EMLC2010 : Jan 2010, Grenoble, France.
Series Title: SPIE Proceedings ; 7545
Title Heading: Proceedings of SPIE -- the International Society for Optical Engineering ; v. 7545.
Author Heading: VDE/VDI. Society Microelectronics, Micro- and Precision Engineering (GMM)
Behringer, Uwe F. W.
Maurer, Wilhelm.
European Mask and Lithography Conference (26th : 2010 : Grenoble, France)
Publication, Distribution, etc.: Bellingham : SPIE
Publication Date: c2010.
Publication Date (W3CDTF): 2010
Extent: 1 v. (various pagings) : ill. ; 28 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Integrated circuits -- Masks -- Congresses.
Microlithography -- Congresses.
LCC: TK7872.M3
NDLC: M17
Note (General): Papers.
" (...) EMLC2010 (...) The conference has annually brought together (...) " -- foreword.
Note (Bibliography): Includes bibliographical references and author index.
Holding library: 国立国会図書館
Call No.: M17-10-3812
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000010959715
http://id.ndl.go.jp/bib/000010959715
OCLC No.: 670241704
https://www.worldcat.org/oclc/670241704
Bibliographic Record Category (NDL): 215