図書

半導体・液晶ディスプレイフォトリソグラフィ技術ハンドブック

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半導体・液晶ディスプレイフォトリソグラフィ技術ハンドブック

Call No. (NDL)
ND371-J153
Bibliographic ID of National Diet Library
000011047906
Material type
図書
Author
石橋健夫, 上野巧, 鵜飼育弘, 嘉代雄, 田中初幸 編
Publisher
リアライズ理工センター
Publication date
2006.1
Material Format
Paper
Capacity, size, etc.
587, 11p ; 31cm
NDC
549.8
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Paper

Material Type
図書
ISBN
4-89808-069-3
Title Transcription
ハンドウタイ エキショウ ディスプレイ フォトリソグラフィ ギジュツ ハンドブック
Author/Editor
石橋健夫, 上野巧, 鵜飼育弘, 嘉代雄, 田中初幸 編
Author Heading
石橋, 健夫, pub.2006 イシバシ, タケオ, pub.2006 ( 01214998 )Authorities
上野, 巧 ウエノ, タクミ ( 00943846 )Authorities
鵜飼, 育弘 ウカイ, ヤスヒロ ( 00720555 )Authorities
Publication, Distribution, etc.
Publication Date
2006.1
Publication Date (W3CDTF)
2006
Extent
587, 11p