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Bibliographic Record
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- Material Type
- 博士論文
- Author/Editor
- Masatoshi Oba [著]
- Author Heading
- 大場, 正利 オオバ, マサトシ
- Publication, Distribution, etc.
- Publication Date
- [2010]
- Publication Date (W3CDTF)
- 2010
- Extent
- 1冊
- Alternative Title
- 縦方向に集積化されたMEMSデバイス作製の研究 タテホウコウ ニ シュウセキカサレタ MEMS デバイス サクセイ ノ ケンキュウ
- Degree grantor/type
- 京都大学