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図書

27th European mask and lithography conference : 18-19 January 2011 : Dresden, Germany : EMLC 2011 : EMLC2011 : Jan 2011, Dresden, Germany. (SPIE Proceedings ; 7985)

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27th European mask and lithography conference : 18-19 January 2011 : Dresden, Germany : EMLC 2011 : EMLC2011 : Jan 2011, Dresden, Germany.

(SPIE Proceedings ; 7985)

Call No. (NDL)
M17-12-179
Bibliographic ID of National Diet Library
000011232374
Material type
図書
Author
European Mask and Lithography Conference (27th : 2011 : Dresden, Germany)ほか
Publisher
SPIE
Publication date
c2011.
Material Format
Paper
Capacity, size, etc.
1 v. (various pagings) ; 28 cm.
NDC
-
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Notes on use

Note (General):

Papers."The conference has annually brought together (...)" -- foreword.

Other physical details:

ill.

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Paper

Material Type
図書
ISBN
9780819485533
ISSN (series)
0277786X
Publication, Distribution, etc.
Publication Date
c2011.
Publication Date (W3CDTF)
2011