図書

27th European mask and lithography conference : 18-19 January 2011 : Dresden, Germany : EMLC 2011 : EMLC2011 : Jan 2011, Dresden, Germany. (SPIE Proceedings ; 7985)

Icons representing 図書

27th European mask and lithography conference : 18-19 January 2011 : Dresden, Germany : EMLC 2011 : EMLC2011 : Jan 2011, Dresden, Germany.

(SPIE Proceedings ; 7985)

Call No. (NDL)
M17-12-179
Bibliographic ID of National Diet Library
000011232374
Material type
図書
Author
European Mask and Lithography Conference (27th : 2011 : Dresden, Germany)ほか
Publisher
SPIE
Publication date
c2011.
Material Format
Paper
Capacity, size, etc.
1 v. (various pagings) ; 28 cm.
NDC
-
View All

Notes on use

Note (General)：

Papers."The conference has annually brought together (...)" -- foreword.

Other physical details：

ill.

Search by Bookstore

Search by Bookstore

Search by Bookstore

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Paper

Material Type
図書
ISBN
9780819485533
ISSN (series)
0277786X
Title
27th European mask and lithography conference : 18-19 January 2011 : Dresden, Germany : EMLC 2011 : EMLC2011 : Jan 2011, Dresden, Germany.
Series Title
SPIE Proceedings ; 7985
Title Heading
Proceedings of SPIE -- the International Society for Optical Engineering ; v. 7985. 0277-786X
Author Heading
European Mask and Lithography Conference (27th : 2011 : Dresden, Germany)
Behringer, Uwe F. W.
VDE/VDI. Society Microelectronics, Micro- and Precision Engineering (GMM)
Publication, Distribution, etc.
Bellingham : SPIE
Publication Date
c2011.
Publication Date (W3CDTF)
2011