Fundamentals of microfabrication and nanotechnology / Marc J. Madou.

• Material Type: 図書
• ISBN: 9781420055115 (v. 1); 9781420055191 (v. 2); 9781420055160 (v. 3)
• Title: Fundamentals of microfabrication and nanotechnology / Marc J. Madou.
• Edition: 3rd ed.
• Author Heading: Madou, Marc J.
• Publication, Distribution, etc.: Boca Raton, FL : CRC Press
• Publication Date: c2012.
• Publication Date (W3CDTF): 2012
• Extent: 3 v. : ill. (some col.) ; 29 cm.
• Place of Publication (Country Code): US
• Text Language Code: eng
• Subject Heading: BioMEMS.; Nanoelectromechanical systems.; TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS.; TECHNOLOGY & ENGINEERING / Material Science.; TECHNOLOGY & ENGINEERING / Electronics / Microelectronics.
• LCC: TP248.25.B54
• DDC: 681/.2
• NDLC: RA71
• Note (Bibliography): Includes bibliographical references and index.
• Holding library: 国立国会図書館
• Call No.: RA71-B379
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000011265575; http://id.ndl.go.jp/bib/000011265575
• LC Control Number: 2011014404; https://lccn.loc.gov/2011014404
• OCLC No.: 726620626; https://www.worldcat.org/oclc/726620626
• Cataloging Rule: Anglo-American Cataloging Rules
• Bibliographic Record Category (NDL): 211

• Contents: V. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnologyv. 2. Manufacturing techniques for microfabrication and nan...