Design for manufacturability through design-process integration 5 : 2-3 March 2011 : San Jose, California, United States : Mar 2011, San Jose, CA. (SPIE Proceedings ; 7974)

Design for manufacturability through design-process integration 5 : 2-3 March 2011 : San Jose, California, United States : Mar 2011, San Jose, CA.

(SPIE Proceedings ; 7974)

Call No. (NDL): M17-12-568
Bibliographic ID of National Diet Library: 000011266129

Material type: 図書

Author: Rieger, Michael L.ほか

Publisher: SPIE

Publication date: c2011.

Material Format: Paper

Capacity, size, etc.: 1 v. (various pagings) ; 28 cm.

NDC: -

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Notes on use

Note (General)：: Papers.

Other physical details：: ill.

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Paper

Material Type: 図書
ISBN: 9780819485335
ISSN (series): 0277786X
Title: Design for manufacturability through design-process integration 5 : 2-3 March 2011 : San Jose, California, United States : Mar 2011, San Jose, CA.
Series Title: SPIE Proceedings ; 7974
Title Heading: Proceedings of SPIE -- the International Society for Optical Engineering ; v. 7974. 0277-786X
Author Heading: Rieger, Michael L.
Mason, Mark E., 1968-
Publication, Distribution, etc.: Bellingham : SPIE
Publication Date: c2011.
Publication Date (W3CDTF): 2011
Extent: 1 v. (various pagings)
Other physical details: ill.
Size: 28 cm.
Additional Title: SPIE advanced lithography.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Integrated circuits--Design and construction--Congresses.
Integrated circuits--Defects--Analysis--Congresses.
Semiconductors--Design and construction--Congresses.
Semiconductor wafers--Defects--Analysis--Congresses.
Microelectronics industry--Quality control--Congresses.
Quality control--Congresses.
LCC: QC371
NDLC: M17
Target Audience: 一般
Note (General): Papers.
Note (Bibliography): Includes bibliographical references and author index.
Holding library: 国立国会図書館
Call No.: M17-12-568
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000011266129
http://id.ndl.go.jp/bib/000011266129
OCLC No.: 748371840
https://www.worldcat.org/oclc/748371840
Cataloging Rule: Anglo-American Cataloging Rules
Bibliographic Record Category (NDL): 215