Silicon oxycarbide films fabricated by using an atmospheric pressure microplasma jet : structural, optical and electrical characterizations

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Material Type: 博士論文
Title: Silicon oxycarbide films fabricated by using an atmospheric pressure microplasma jet : structural, optical and electrical characterizations
Author/Editor: 丁毅 [著]
Author Heading: 丁, 毅ディン, イ
Publication, Distribution, etc.: [丁毅]
Publication Date: [2010]
Publication Date (W3CDTF): 2010
Extent: 1冊
Alternative Title: 大気圧マイクロプラズマジェットにより作製したSiOC薄膜とその微細構造、光学・電気的物性評価タイキアツマイクロプラズマジェットニヨリサクセイシタ SiOC ハクマクトソノビサイコウゾウコウガクデンキテキブッセイヒョウカ
Degree grantor/type: 埼玉大学
Date Granted: 平成22年3月24日
Date Granted (W3CDTF): 2010
Dissertation Number: 甲第777号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: UT51
Target Audience: 一般
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2011-G767
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000011285264
http://id.ndl.go.jp/bib/000011285264
Bibliographic Record Category (NDL): 213