Photomask and next-generation lithography mask technology 18 : 13-15 April 2011 : Yokohama, Japan : Apr 2011, Yokohama, Japan. (SPIE Proceedings ; 8081)

Photomask and next-generation lithography mask technology 18 : 13-15 April 2011 : Yokohama, Japan : Apr 2011, Yokohama, Japan.

(SPIE Proceedings ; 8081)

Call No. (NDL): M17-12-1047
Bibliographic ID of National Diet Library: 000011287971

Material type: 図書

Author: Konishi, Toshio.

Publisher: SPIE

Publication date: c2011.

Material Format: Paper

Capacity, size, etc.: 1 v. (various pagings) ; 28 cm.

NDC: -

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Notes on use

Note (General)：: Papers."This conference was canceled due to the earthquake off the northeast coast of Japan in March 2011. This volume includes some of the papers tha...

Other physical details：: ill. (some col.)

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Paper

Material Type: 図書
ISBN: 9780819486738
ISSN (series): 0277786X
Title: Photomask and next-generation lithography mask technology 18 : 13-15 April 2011 : Yokohama, Japan : Apr 2011, Yokohama, Japan.
Series Title: SPIE Proceedings ; 8081
Title Heading: Proceedings of SPIE -- the International Society for Optical Engineering ; v. 8081. 0277-786X
Author Heading: Konishi, Toshio.
Publication, Distribution, etc.: Bellingham : SPIE
Publication Date: c2011.
Publication Date (W3CDTF): 2011
Extent: 1 v. (various pagings)
Other physical details: ill. (some col.)
Size: 28 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Masks (Electronics)--Congresses.
Integrated circuits--Masks--Congresses.
X-ray lithography--Congresses.
Microlithography--Congresses.
Optoelectronic devices--Design and construction--Congresses.
LCC: QC371
NDLC: M17
Target Audience: 一般
Note (General): Papers.
"This conference was canceled due to the earthquake off the northeast coast of Japan in March 2011. This volume includes some of the papers that were scheduled to be presented at the conference."
Note (Bibliography): Includes bibliographical references and author index.
Holding library: 国立国会図書館
Call No.: M17-12-1047
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000011287971
http://id.ndl.go.jp/bib/000011287971
OCLC No.: 751830186
https://www.worldcat.org/oclc/751830186
Cataloging Rule: Anglo-American Cataloging Rules
Bibliographic Record Category (NDL): 215