Sputtering materials for VLSI and thin film devices

• Material Type: 図書
• ISBN: 9780815515937; 0815515936
• Title: Sputtering materials for VLSI and thin film devices
• Author/Editor: Jaydeep Sarkar.
• Edition: First edition.
• Author Heading: Sarkar, Jaydeep, (Materials scientist)
• Publication, Distribution, etc.: Waltham, USA : William Andrew (出版)
• Publication Date: 2014.
• Publication Date (W3CDTF): 2014
• Extent: x, 603 pages
• Other physical details: illustrations
• Size: 25 cm
• Place of Publication (Country Code): US
• Text Language Code: eng
• Content Type: text
• Media Type: unmediated
• Carrier Type: volume
• Subject Heading: Microelectronics--Materials.; Cathode sputtering (Plating process)--Materials.; Integrated circuits--Very large scale integration--Materials.; Thin film devices--Materials.; Flat panel displays--Materials.; Sputtering (Physics)
• LCC: TS695
• DDC: 621.381
• NDLC: ND371
• Target Audience: 一般
• Note (Bibliography): Includes bibliographical references and index.
• Holding library: 国立国会図書館
• Call No.: ND371-B88
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 023210982; http://id.ndl.go.jp/bib/023210982
• LC Control Number: 2014469441; https://lccn.loc.gov/2014469441
• OCLC No.: 660539201; https://www.worldcat.org/oclc/660539201
• Cataloging Rule: RDA
• Bibliographic Record Category (NDL): 211