Instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors 5 : 24-25 August 2011 : San Diego, California, United States : Aug 2011, San Diego, CA.

• Material Type: 図書
• ISBN: 9780819487155 (pbk.)
• ISSN (series): 0277786X
• Title: Instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors 5 : 24-25 August 2011 : San Diego, California, United States : Aug 2011, San Diego, CA.
• Series Title: SPIE Proceedings ; 8105
• Title Heading: Proceedings of SPIE -- the International Society for Optical Engineering ; v. 8105. 0277-786X
• Author Heading: Postek, Michael T.; Coleman, Victoria Anne, 1981-
• Publication, Distribution, etc.: Bellingham : SPIE
• Publication Date: c2011.
• Publication Date (W3CDTF): 2011
• Extent: 1 v. (various pagings)
• Other physical details: ill.
• Size: 28 cm.
• Additional Title: SPIE optics + photonics.
• Place of Publication (Country Code): US
• Text Language Code: eng
• Subject Heading: Nanostructured materials--Congresses.; Microfabrication--Congresses.; Nanotechnology--Congresses.
• LCC: TA418.9.N35; QC371
• NDLC: M17
• Target Audience: 一般
• Note (General): Papers.
• Note (Bibliography): Includes bibliographical references and author index.
• Holding library: 国立国会図書館
• Call No.: M17-12-1706
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 023221291; http://id.ndl.go.jp/bib/023221291
• LC Control Number: 2012360868; https://lccn.loc.gov/2012360868
• OCLC No.: 773740910; https://www.worldcat.org/oclc/773740910
• Cataloging Rule: Anglo-American Cataloging Rules
• Bibliographic Record Category (NDL): 215