博士論文

Multirate control techniques for fast and precise positioning and applications to high-precision stages

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Multirate control techniques for fast and precise positioning and applications to high-precision stages

Call No. (NDL)
UT51-2011-Q533
Bibliographic ID of National Diet Library
023532890
Material type
博士論文
Author
Koichi Sakata [著]
Publisher
[Koichi Sakata]
Publication date
[2011]
Material Format
Paper
Capacity, size, etc.
1冊
Name of awarding university/degree
横浜国立大学,博士 (工学)
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博士論文

Accompanying material:

要旨 2枚

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Paper

Material Type
博士論文
Author/Editor
Koichi Sakata [著]
Author Heading
坂田, 晃一 サカタ, コウイチ
Publication, Distribution, etc.
Publication Date
[2011]
Publication Date (W3CDTF)
2011
Extent
1冊
Accompanying material
要旨 2枚
Alternative Title
高速高精度位置決めのためのマルチレート制御技術と超精密ステージへの応用 コウソク コウセイド イチギメ ノ タメ ノ マルチレート セイギョ ギジュツ ト チョウセイミツ ステージ エ ノ オウヨウ