博士論文

Study on nano-scale servo control of high-speed high-precision atomic force microscopes

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Study on nano-scale servo control of high-speed high-precision atomic force microscopes

Call No. (NDL)
UT51-2011-Q588
Bibliographic ID of National Diet Library
023537835
Material type
博士論文
Author
Takayuki Shiraishi [著]
Publisher
[Takayuki Shiraishi]
Publication date
[2011]
Material Format
Paper
Capacity, size, etc.
1冊
Name of awarding university/degree
横浜国立大学,博士 (工学)
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博士論文

Accompanying material:

要旨 1枚

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Paper

Material Type
博士論文
Author/Editor
Takayuki Shiraishi [著]
Author Heading
白石, 貴行 シライシ, タカユキ
Publication, Distribution, etc.
Publication Date
[2011]
Publication Date (W3CDTF)
2011
Extent
1冊
Accompanying material
要旨 1枚
Alternative Title
原子間力顕微鏡の高速高精度ナノスケールサーボ制御に関する研究 ゲンシカンリョク ケンビキョウ ノ コウソク コウセイド ナノスケール サーボ セイギョ ニ カンスル ケンキュウ