Direct patterning of thin oxide layer of compound semiconductors by low-energy electron-beam lithography for successive selective area growth

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Material Type: 博士論文
Title: Direct patterning of thin oxide layer of compound semiconductors by low-energy electron-beam lithography for successive selective area growth
Author/Editor: Kazuhiro Matsuda [著]
Author Heading: 松田, 一宏マツダ, カズヒロ
Publication, Distribution, etc.: [Kazuhiro Matsuda]
Publication Date: [2011]
Publication Date (W3CDTF): 2011
Extent: 1冊
Alternative Title: 低加速電子線描画による化合物半導体表面酸化膜の直接改質とその場選択成長テイカソクデンシセンビョウガニヨルカゴウブツハンドウタイヒョウメンサンカマクノチョクセツカイシツトソノバセンタクセイチョウ
Degree grantor/type: 関西学院大学
Date Granted: 平成23年11月16日
Date Granted (W3CDTF): 2011
Dissertation Number: 甲第396号
Degree Type: 博士 (理学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: UT51
Target Audience: 一般
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2011-R221
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 023575668
http://id.ndl.go.jp/bib/023575668
Bibliographic Record Category (NDL): 213