2010 international symposium on semiconductor manufacturing : (ISSM 2010) : Tokyo, Japan : 18-20 October 2010 : 18th annual ISSM : ISSM2010 : Oct 2010, Tokyo, Japan.

Author: International Symposium on Semiconductor Manufacturing (2010 : Tokyo, Japan)

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Note (General)：: Program, presentations, an abstract and papers.IEEE cat no CFP10SSM-PRT.

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Material Type: 図書
ISBN: 9781457703928
ISSN: 1523553X
Title: 2010 international symposium on semiconductor manufacturing : (ISSM 2010) : Tokyo, Japan : 18-20 October 2010 : 18th annual ISSM : ISSM2010 : Oct 2010, Tokyo, Japan.
Author Heading: International Symposium on Semiconductor Manufacturing (2010 : Tokyo, Japan)
Publication, Distribution, etc.: Piscataway : IEEE
Publication Date: c2010.
Publication Date (W3CDTF): 2010
Extent: 446 p.
Other physical details: ill.
Size: 27 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Semiconductors--Design and construction--Congresses.
Semiconductor industry--Congresses.
Computer integrated manufacturing systems--Congresses.
LCC: TK7871.85
NDLC: M17
Target Audience: 一般
Note (General): Program, presentations, an abstract and papers.
IEEE cat no CFP10SSM-PRT.
Note (Bibliography): Includes bibliographical references and author index.
Source: http://ieeexplore.ieee.org/servlet/opac?punumber=5741884
Holding library: 国立国会図書館
Call No.: M17-12-3272
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 023595984
http://id.ndl.go.jp/bib/023595984
OCLC No.: 770428135
https://www.worldcat.org/oclc/770428135
Cataloging Rule: Anglo-American Cataloging Rules
Bibliographic Record Category (NDL): 215