Ceramic thick films for MEMS and microdevices (Micro and nano technologies series)

Ceramic thick films for MEMS and microdevices

(Micro and nano technologies series)

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Material Type: 図書
ISBN: 9781437778175 (hbk.)
1437778178 (hbk.)
Title: Ceramic thick films for MEMS and microdevices
Author/Editor: Robert Dorey.
Series Title: Micro and nano technologies series
Title Heading: Micro & nano technologies.
Author Heading: Dorey, Robert.
Publication, Distribution, etc.: Waltham, [MA] : William Andrew
Publication Date: c2012.
Publication Date (W3CDTF): 2012
Extent: xviii, 191 p.
Other physical details: ill.
Size: 24 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Thick-film circuits--Design and construction.
Microelectromechanical systems--Design and construction.
Nanoelectronics.
LCC: TK7871.15.F5
DDC: 621.3815
NDLC: ND371
Target Audience: 一般
Note (Bibliography): Includes bibliographical references (p. 183-185) and index.
Holding library: 国立国会図書館
Call No.: ND371-B66
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 023691854
http://id.ndl.go.jp/bib/023691854
LC Control Number: 2011276747
https://lccn.loc.gov/2011276747
OCLC No.: 751752964
https://www.worldcat.org/oclc/751752964
Bibliographic Record Category (NDL): 211