2012 23rd annual SEMI advanced semiconductor manufacturing conference : (ASMC 2012) : Saratoga Springs, New York, USA : 15-17 May 2012 : May 2012, Saratoga Springs, NY.

Author: IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (23rd : 2012 : Saratoga Springs, N.Y.)

Notes on use

Search by Bookstore

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 図書
ISBN: 9781467303507 (pbk.)
ISSN: 10788743
Title: 2012 23rd annual SEMI advanced semiconductor manufacturing conference : (ASMC 2012) : Saratoga Springs, New York, USA : 15-17 May 2012 : May 2012, Saratoga Springs, NY.
Author Heading: IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (23rd : 2012 : Saratoga Springs, N.Y.)
Publication, Distribution, etc.: Piscataway : IEEE
Publication Date: c2012.
Publication Date (W3CDTF): 2012
Extent: 419 p.
Other physical details: ill.
Size: 27 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Semiconductors--Design and construction--Congresses.
Semiconductor industry--Congresses.
Process control--Congresses.
DDC: 621.38152
NDLC: M17
Target Audience: 一般
Note (General): Papers.
IEEE cat no CFP12ASC-PRT.
Note (Bibliography): Includes bibliographical references.
Holding library: 国立国会図書館
Call No.: M17-12-3902
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 023781703
http://id.ndl.go.jp/bib/023781703
OCLC No.: 805006818
https://www.worldcat.org/oclc/805006818
Cataloging Rule: Anglo-American Cataloging Rules
Bibliographic Record Category (NDL): 215