図書

Microlithography : science and technology Third edition

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Microlithography : science and technology

Third edition

Call No. (NDL)
ND371-D33
Bibliographic ID of National Diet Library
023854120
Material type
図書
Author
edited by Bruce W. Smith and Kazuaki Suzuki
Publisher
CRC Press
Publication date
2020
Material Format
Paper
Capacity, size, etc.
xi, 837 pages ; 26 cm
NDC
-
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Detailed bibliographic record

Summary, etc.:

"Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of subm...

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Paper

Material Type
図書
ISBN
9781439876756 (hbk)
9781315117171 (ebk)
Author/Editor
edited by Bruce W. Smith and Kazuaki Suzuki
Edition
Third edition
Publication, Distribution, etc.
Publication Date
2020
Publication Date (W3CDTF)
2020
Extent
xi, 837 pages