図書

半導体・MEMSのための超臨界流体

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半導体・MEMSのための超臨界流体 = Supercritical Fluid Technology in MEMS and Semiconductor Processing

Call No. (NDL)
PA51-J43
Bibliographic ID of National Diet Library
023886904
Material type
図書
Author
近藤英一 編著
Publisher
コロナ社
Publication date
2012.9
Material Format
Paper
Capacity, size, etc.
227p ; 21cm
NDC
431.3
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Notes on use

Note (General):

執筆: 上野和良ほか

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Kanto

  • 岐阜県図書館

    Paper
    Call No.:
    549.8-コ
    Book Registration Number:
    8134298916
  • 岡山県立図書館

    Paper
    Call No.:
    549.8/コン12/
    Book Registration Number:
    0011452646

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Bibliographic Record

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Paper

Material Type
図書
ISBN
978-4-339-00837-1
Title Transcription
ハンドウタイ エムイーエムエス ノ タメ ノ チョウリンカイ リュウタイ
Author/Editor
近藤英一 編著
Author Heading
近藤, 英一 コンドウ, エイイチ ( 01016950 )Authorities
Publication, Distribution, etc.
Publication Date
2012.9
Publication Date (W3CDTF)
2012
Extent
227p