Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nano-materials, and MEMS Second edition.

Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nano-materials, and MEMS

Second edition.

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Material Type: 図書
ISBN: 9781437734836
1437734839
Title: Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nano-materials, and MEMS
Author/Editor: edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera.
Edition: Second edition.
Author Heading: 和佐, 清孝ワサ, キヨタカ ( 00130622 )Authorities
Kanno, Isaku. [神野伊策]
小寺, 秀俊コテラ, ヒデトシ ( 01228602 )Authorities
Publication, Distribution, etc.: Waltham [MA] : William Andrew
Publication Date: 2012.
Publication Date (W3CDTF): 2012
Extent: xii, 644 pages
Size: 24 cm
Place of Publication (Country Code): US
Text Language Code: eng
Content Type: text
Media Type: unmediated
Carrier Type: volume
Subject Heading: Cathode sputtering (Plating process)--Handbooks, manuals, etc.
Thin films--Handbooks, manuals, etc.
LCC: TS695
NDLC: ND371
Target Audience: 一般
Note (Bibliography): Includes bibliographical references and index.
Collection (particular): 日本関係外国語図書
Holding library: 国立国会図書館
Call No.: ND371-B75
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 023931619
http://id.ndl.go.jp/bib/023931619
OCLC No.: 802326755
https://www.worldcat.org/oclc/802326755
Cataloging Rule: RDA
Bibliographic Record Category (NDL): 211