Photomask technology 2012 : 11-13 September 2012 : Monterey, California, United States : SPIE conference on photomask technology 2012 : 32nd international symposium on photomask technology : Sep 2012, Monterey, CA. (SPIE Proceedings ; 8522)

Photomask technology 2012 : 11-13 September 2012 : Monterey, California, United States : SPIE conference on photomask technology 2012 : 32nd international symposium on photomask technology : Sep 2012, Monterey, CA.

(SPIE Proceedings ; 8522)

Call No. (NDL): M17-13-1687
Bibliographic ID of National Diet Library: 024187763

Material type: 図書

Author: Abboud, Frank E.ほか

Publisher: SPIE

Publication date: c2012.

Material Format: Paper

Capacity, size, etc.: 1 v. (various pagings) ; 28 cm.

NDC: -

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Notes on use

Note (General)：: An abstract and papers.Described as "The conference was (...) held as part of the 32nd International Symposium on Photomask Technology 10-13 September...

Other physical details：: ill.

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Paper

Material Type: 図書
ISBN: 9780819492609 (paperback)
ISSN (series): 0277786X
Title: Photomask technology 2012 : 11-13 September 2012 : Monterey, California, United States : SPIE conference on photomask technology 2012 : 32nd international symposium on photomask technology : Sep 2012, Monterey, CA.
Series Title: SPIE Proceedings ; 8522
Author Heading: Abboud, Frank E.
Faure, Thomas B.
Publication, Distribution, etc.: Bellingham : SPIE
Publication Date: c2012.
Publication Date (W3CDTF): 2012
Extent: 1 v. (various pagings)
Other physical details: ill.
Size: 28 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Integrated circuits--Masks--Congresses.
Masks (Electronics)--Congresses.
Microlithography--Congresses.
NDLC: M17
Target Audience: 一般
Note (General): An abstract and papers.
Described as "The conference was (...) held as part of the 32nd International Symposium on Photomask Technology 10-13 September 2012 in Monterey, (...)" -- introd.
Note (Bibliography): Includes bibliographical references and author index.
Holding library: 国立国会図書館
Call No.: M17-13-1687
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 024187763
http://id.ndl.go.jp/bib/024187763
LC Control Number: 2012540918
https://lccn.loc.gov/2012540918
Cataloging Rule: Anglo-American Cataloging Rules
Bibliographic Record Category (NDL): 215