Handbook of microlithography, micromachining, and microfabrication

• Material Type: 図書
• ISBN: 0819423785 (v. 1)
• Title: Handbook of microlithography, micromachining, and microfabrication
• Author/Editor: P. Rai-Choudhury, editor.
• Series Title: IEE materials and devices series ; 12; SPIE Press monograph ; PM39
• Title Heading: IEE materials & devices series ; 12A-12B.
• Author Heading: Rai-Choudhury, P.
• Publication, Distribution, etc.: Bellingham, Washington, USA : SPIE Optical Engineering Press; London, UK : The Institution of Electrical Engineers
• Publication Date: [1997]-
• Publication Date (W3CDTF): 1997
• Extent: volumes
• Other physical details: illustrations
• Size: 26 cm.
• Alternative Title: Microlithography, micromachining, and microfabrication
• Place of Publication (Country Code): US
• Text Language Code: eng
• Content Type: text
• Media Type: unmediated
• Carrier Type: volume
• Subject Heading: Microlithography.; Micromachining.; Microfabrication.
• LCC: TK7836
• DDC: 670
• NDLC: ND351
• Target Audience: 一般
• Note (Bibliography): Includes bibliographical references and indexes.
• Holding library: 国立国会図書館
• Call No.: ND351-B56
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 024625711; http://id.ndl.go.jp/bib/024625711
• LC Control Number: 96040237; https://lccn.loc.gov/96040237
• Cataloging Rule: RDA
• Bibliographic Record Category (NDL): 211

• Contents: v. 1. Microlithography.(Provided by: 国立国会図書館蔵書)