Modeling aspects in optical metrology 4 : 13-14 May 2013 : Munich, Germany : conference modelling aspects in optical metrology 2013 : SPIE optical metrology symposium : May 2013, Munich, Germany.

• Material Type: 図書
• ISBN: 9780819496058
• ISSN (series): 0277786X
• Title: Modeling aspects in optical metrology 4 : 13-14 May 2013 : Munich, Germany : conference modelling aspects in optical metrology 2013 : SPIE optical metrology symposium : May 2013, Munich, Germany.
• Series Title: SPIE Proceedings ; 8789
• Title Heading: Proceedings of SPIE -- the International Society for Optical Engineering ; v. 8789. 0277-786X
• Author Heading: Bodermann, Bernd.; Frenner, Karsten.; Silver, Richard M.; European Optical Society (EOS)
• Publication, Distribution, etc.: Bellingham : SPIE
• Publication Date: c2013.
• Publication Date (W3CDTF): 2013
• Extent: 1 v. (various pagings)
• Other physical details: ill.
• Size: 28 cm.
• Additional Title: SPIE optical metrology.
• Place of Publication (Country Code): US
• Text Language Code: eng
• Genre/Form Terms: Electronic books.
• Subject Heading: Optical measurements--Congresses.; Integrated circuits--Congresses.; Semiconductors--Design and construction--Congresses.
• LCC: QC367
• NDLC: M17
• Target Audience: 一般
• Note (General): Papers.; "The conference Modelling Aspects in Optical Metrology 2013 is organised for the fourth time (...)" -- introd.
• Note (Bibliography): Includes bibliographical references and author index.
• Source: SPIE Digital Library; http://link.spie.org/PSISDG/8789/1
• Holding library: 国立国会図書館
• Call No.: M17-14-100
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 024670209; http://id.ndl.go.jp/bib/024670209
• OCLC No.: 847841303; https://www.worldcat.org/oclc/847841303
• Cataloging Rule: Anglo-American Cataloging Rules
• Bibliographic Record Category (NDL): 215