Smart sensors, actuators, and MEMS 6 : 24-26 April 2013 : Grenoble, France : conference smart sensors, actuators and MEMS : Apr 2013, Grenoble, France.

• Material Type: 図書
• ISBN (set): 9780819495600 (set)
• ISSN (series): 0277786X
• Title: Smart sensors, actuators, and MEMS 6 : 24-26 April 2013 : Grenoble, France : conference smart sensors, actuators and MEMS : Apr 2013, Grenoble, France.
• Series Title: SPIE Proceedings ; 8763
• Title Heading: Proceedings of SPIE -- the International Society for Optical Engineering ; v. 8763. 0277-786X
• Author Heading: Schmid, Ulrich, Prof.; Sánchez-Rojas, José Luis.; Leester-Schaedel, Monika.
• Publication, Distribution, etc.: Bellingham : SPIE
• Publication Date: c2013.
• Publication Date (W3CDTF): 2013
• Extent: 2 parts
• Other physical details: ill. (some col.)
• Size: 28 cm.
• Additional Title: SPIE microtechnologies.
• Place of Publication (Country Code): US
• Text Language Code: eng
• Genre/Form Terms: Electronic books.
• Subject Heading: Microelectromechanical systems--Congresses.; Microtechnology--Congresses.; Actuators--Industrial applications--Congresses.; Detectors--Industrial applications--Congresses.; Scanning systems--Congresses.
• LCC: TK7875
• NDLC: M17
• Target Audience: 一般
• Note (General): Papers.
• Note (Bibliography): Includes bibliographical references and author index.
• Source: SPIE Digital Library; http://link.spie.org/PSISDG/8763/1
• Holding library: 国立国会図書館
• Call No.: M17-13-3457
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 024692882; http://id.ndl.go.jp/bib/024692882
• OCLC No.: 847841380; https://www.worldcat.org/oclc/847841380
• Cataloging Rule: Anglo-American Cataloging Rules
• Bibliographic Record Category (NDL): 215